RS type scanner

The scanner can be used for display (AR, projector), lidar, and short-range scanning purposes.

The RS type scanner is a rotatable micromirror with a comb drive actuator capable of out-of-plane motion. The stator comb and the driver comb are configured to have the same height. In general, they do not drive even when voltage is applied.

These micromirrors have very low power consumption and have a very high resonant frequency of several kHz because the size of the mirror is small.

The chip is usually combined with other scanners that operate at a relatively slow speed to form a LIDAR system and is responsible for fast axis scanning, which is the most important factor in obtaining information.