QS type Scanner

The QR2 type electrostatic comb-driven scanner used for laser 2D steering in OCT, AR glass, LiDAR, and other applications incorporates a technology that combines two drive methods based on a comb structure.
The laser 2D steering method includes two scanning modes: low-speed and high-speed scanning. For the high-speed scanning mode, it utilizes the resonant characteristics of mirrors to achieve high-frequency (approximately 32kHz) driving. For the low-speed scanning mode, it employs the driving characteristics in the non-resonant region to achieve low-frequency driving.
These electrostatic-driven scanners are manufactured using silicon-based MEMS processes, enabling mass production and resulting in small and lightweight components. Additionally, due to their driving mechanism, they possess low power consumption values.